Lecture Analysis of Microsystems
Details
Type of course: lecture (Vorlesung); required within the Master of Microsystems Engineering program
Credits: 3 ECTS
Time: Every summer semesters.
Description
XPS, TEM, FTIR, UPS, SEM, AFM, SPR, GIR, ATR, STM?? Got it?
The performance of microsytems is often dominate by the nature of the surfaces involved. This course honors the great importance of surfaces and interfaces in microsystems engineering by introducing the most common techniques for surface analysis.
Ilias E-Learning link
Details and materials are provided through the ILIAS e-learning plattform. You will need your University credentials a link to the page and a course password. The link and the course password are available from prucker@imtek.de.